Electron probe micro-analyser CAMECA SX100 (EPMA)

Specifications

CAMECA SX100 microprobe automation and analysis are done via Cameca Peaksight PC software.

The microprobe is equipped with :

• a tungsten filament gun
• a motorised sample stage (x, y, z) with 1 µm reproducibility
• 4 vertical WDS spectrometers mounted vertically (one is a high Ar-CH4 pressure) with conventionnal diffracting crystals (TAP, PET, LiF) or multi-layers monochromators (PC1:W/Si, PC2:Ni/C, PC3: Mo/B4C)
• an anticontamination system :  O2 gas jet,  LN2 cold plate (for light elements analysis)

Applications

• secondary-electrons (Everhart-Thornley) imaging, back-scattered and absorbed-electron imaging
• Programming analysis points and profiles, wavelength spectra acquisition,..
• Dedicated SAMx Stratagem software for thin film analysis is also used
• 2D element mapping