Specifications
CAMECA SX100 microprobe automation and analysis are done via Cameca Peaksight PC software.
The microprobe is equipped with :
Applications
CAMECA SX100 microprobe automation and analysis are done via Cameca Peaksight PC software.
The microprobe is equipped with :
- a tungsten filament gun
- a motorised sample stage (x, y, z) with 1 µm reproducibility
- 4 vertical WDS spectrometers mounted vertically (one is a high Ar-CH4 pressure) with conventionnal diffracting crystals (TAP, PET, LiF) or multi-layers monochromators (PC1:W/Si, PC2:Ni/C, PC3: Mo/B4C)
- an anticontamination system : O2 gas jet, LN2 cold plate (for light elements analysis)
Applications
- secondary-electrons (Everhart-Thornley) imaging, back-scattered and absorbed-electron imaging
- Programming analysis points and profiles, wavelength spectra acquisition,..
- Dedicated SAMx Stratagem software for thin film analysis is also used
- 2D element mapping