Electron probe micro-analyser - EPMA - Generalities
An electron probe micro-analyser is a microbeam instrument equipped with wavelength dispersive spectrometers (WDS) and a beam current regulation.
This equipment is dedicated to X-ray microanalysis of solid specimens. This non-destructive technique allows to determine the elemental composition of specimens in micron-sized volumes.
Analysed elements :
- from Béryllium to Uranium
- high sensitivity to light elements (Be, B, C, N, O, F) detection
Detection limit : several tens of parts per million (ppm) for elements other than light elements
Accuracy of analysis : 1 - 3%
Accelerating voltage : up to 30kV
Beam current : until 1µA
Spectral resolution (Mn Ka characteristic line) : 17eV (LiF)