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Plateforme technologique de caractérisation des matériaux

Recherche - Formation - Valorisation
Recherche - Formation - Valorisation

> CMTC_Equipements > WDS

Electron probe micro-analyser - EPMA - Generalities

An electron probe micro-analyser is a microbeam instrument equipped with wavelength dispersive spectrometers (WDS) and a beam current regulation.
This equipment is dedicated to X-ray microanalysis of solid specimens. This non-destructive technique allows to determine the elemental composition of specimens in micron-sized volumes.

Analytical features
  • Analysed elements :
- from Béryllium to Uranium
- high sensitivity to light elements (Be, B, C, N, O, F) detection
  • Detection limit : several tens of parts per million (ppm) for elements other than light elements CMTC - Microsonde de Castaing CAMECA SX100 (WDS)
  • Accuracy of analysis : 1 - 3%
  • Accelerating voltage : up to 30kV
  • Beam current : until 1µA
  • Spectral resolution (Mn Ka characteristic line) : 17eV (LiF)

Date of update April 14, 2020

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CMTC
CMTC - Consortium des Moyens Technologiques Communs
Domaine Universitaire - 1260 rue de la Piscine - BP 75
38402 Saint-Martin-d'Hères Cedex
Tél. : +33 (0)4 76 82 66 03 - Fax. : +33 (0)4 76 82 66 64
Université Grenoble Alpes