Specific features of the machine
The automation of the CAMECA SX100 electron microprobe and the analysis process utilize Cameca Peaksight software.
The microprobe is equipped with: 
- a W filament gun
- a motorized stage with x, y, z movement accurate to the micrometer
- 4 vertical wavelength-dispersive spectrometers (including one for high-pressure Ar-CH4) with conventional crystals (TAP, PET, LiF) or multilayer coatings (PC1:W/Si, PC2:Ni/C, PC3: Mo/B4C)
- a liquid nitrogen trap and a micro-oxygen leak (anti-contamination system for the analysis of light elements)
Completed Projects
- Secondary electron (Everhart-Thornley), backscattered, and absorbed images
- Programming of spot sizes, analysis profiles, wavelength spectra, etc.
- Thin-film analysis performed using Stratagem SAMx software
- X-ray mapping