SEM FEG ZEISS GeminiSEM 500

High-resolution scanning electron microscope

Specific features of the machine

• Schottky-type field emission gun (FEG)
• High vacuum (HV) mode or pressure-controlled mode (VP/NanoVP/XVP)
• Acceleration voltage: 0.02 to 30 kV
• Secondary electron resolution :
  • 0.6 nm at 15kV
  • 1.1 nm at 1kV

High-vacuum imaging

• secondary electrons (In-Lens / Everhart-Thornley)
• backscattered electrons (EsB / QBSD)
• transmitted electrons (STEM)

Pressure-controlled imaging

• secondary electrons (depending on pressure: VPSE and/or In-Lens)
• backscattered electrons (depending on pressure: VPSD and/or EsB)

Equipments

• Energy-dispersive X-ray microanalysis (EDX) system with an SDD detector (EDAX OCTANE ELITE 25 with a 60 mm² Si3N4 ceramic window)
• EBSD analysis system with a digital CCD camera (EDAX VELOCITY) and OIM and TEAM software

In-situ

• Plasma cleaner
• Nanoindentation
• Tensile testing at room temperature and elevated temperatures, on a flat specimen or at a 70° angle