High-resolution scanning electron microscope
Specific features of the machine
- Schottky-type field emission gun (FEG)
- High vacuum (HV) mode or pressure-controlled mode (VP)
- Acceleration voltage: 0.02 to 30 kV
- Secondary electron resolution :
- 0.7 nm at 15kV
- 1.1 nm at 1kV
High-vacuum imaging
- secondary electrons (In-Lens / Everhart-Thornley)
- backscattered electrons (EsB / BSD)
Pressure-controlled imaging
- secondary electrons (depending on the pressure: C2D and/or In-Lens)
- backscattered electrons (EsB)
Equipments
- Energy-dispersive X-ray microanalysis (EDS) system with a Bruker XFlash 7-60 SDD detector (7th generation with a 60 mm² surface area)
- EBSD analysis system with a digital CCD camera (EDAX HIKARI SUPER) and OIM and TEAM software