High-resolution scanning electron microscope
Specific features of the machine 
- Schottky-type field emission gun (FEG)
- High vacuum (HV) mode
- Acceleration voltage: 0.02 to 30 kV
- Secondary electron resolution:
- 0.7 nm at 15kV
- 1.2 nm at 1kV - 1.1nm with polarization
- 1.5 nm at 500 V
- Probe current: 3 pA to 20 nA
- 7 electrostatic diaphragms
- Eucentric stage with 6 motorized axes
High-vacuum imaging
- secondary electrons (In-Lens / Everhart-Thornley)
- backscattered electrons (EsB with energy filtering / retractable 6-sector BSD)
Equipment
- Energy-dispersive X-ray microanalysis (EDS) system with an SDD detector (BRUKER AXS-30mm2)
Reserve equipement
with thee support of
