Field-emission Scanning Electron Microscope
Specific features of the machine 
- Schottky-type Field Emission Gun (FEG)
- High vacuum (HV) mode at 10⁻⁴ Pa or low vacuum (LV) mode from 10 to 150 Pa in air
- Acceleration voltage: 0.5 to 30 kV
- Secondary electron resolution (HV mode) :
- 1.5 nm at 30kV
- 4.0 nm at 1kV
High-vacuum imaging
- optical navigation camera
- using secondary electrons (Everhart-Thornley)
- using backscattered electrons (BED)
Equipment
- Energy-dispersive X-ray microanalysis (EDS) system with an SDD detector (BRUKER 60 mm²)